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RB Tool & Manufacturing Company

Mycalex Ceramic Vacuum Arm

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CNC Machining of a Mycalex Ceramic Vacuum Arm
CNC Machining of a Mycalex Ceramic Vacuum Arm

At RB Tool & Manufacturing Company, we specialize in the precision machining of components for a wide range of applications and materials. Because of our reputation, a customer in the semiconductor equipment industry chose us to fabricate this ceramic vacuum arm. Used for rotating wafers inside tracking equipment, the component required precision machining and a highly polished, smooth and contaminant-free finish.

This component is composed of 0.125" thick machining-grade, Mykroy/Mycalex MM 500 glass-bonded mica composite sheets. Raw material was milled to dimensions of 6.065" x 1.250" x 0.110", utilizing our advanced vertical machining centers, equipped with vacuum plates. This added feature provides a uniform work-holding pressure, which allowed us to easily achieve the precision tolerances of ±.0005" on perpendicularity and ±.002" on parallelism. After deburring we applied a PTFE coating and hand polished the vacuum rings to a 16 RMS surface finish.

At each step of the process, we employed sophisticated metrology equipment, including CMMs and surface finish analyzers, to ensure specifications were met and critical dimensions maintained. Our ability to consistently hold tight tolerances while executing multiple processes, from highly automated milling to precision hand-polishing, ensured the integrity of this critical piece. To learn more about this project, or how our skills can improve your next project, contact us today.

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Highlights of CNC Machining of a Mycalex Ceramic Vacuum Arm

Product Description
Vacuum arm rotates chip wafer inside Track Equipment
CNC Milling Capabilities Applied/Processes
CNC Milling
Hand Polishing Vacuum Rings
Equipment Used to Manufacture Part
Vertical Mill with a vacuum plate
Overall Part Dimensions
Length: 6.065" - 7.255"
Width: 1.250"
Depth: 0.110"
Tightest Tolerances
0.0005" Perpendicularity
0.002" Parallelism
Material Used
Mykroy/Mycalex MM 500 Machining Grade Glass-Bonded Mica
Composite Sheet
  • Thickness: 0.125"
Material Finish
16 RMS Surface Finish
Teflon Coated
In process testing/inspection performed
CMM, Vacuum Test
Dimensional Inspection
Visual Inspection
Industry for Use
50 - 60 pcs/year
Delivery/Turnaround Time
3 - 4 Weeks
Delivery Location
FOB Origin
Standards Met
ISO 9001:2008
Customer Specifications, 2D CAD Drawing
Product Name
Ceramic Vacuum Arm